Abstract
The local atomic bonding structure of carbon nitride films synthesized by the reactive ionized cluster beam method using X-ray emission spectra (XES) was examined. An ionized cluster beam system was used to prepare the carbon nitride films. The composition of carbon nitride films was measured with Rutherford backscattering spectroscopy techniques and the N/C ratio was found to be approximately 0.25. The XES measurements of the carbon nitride films showed a predominant proportion of sp bonded carbon and nitrogen atoms.