Characterising ion-cut in GaAs by Rutherford backscattering spectroscopy

Journal article

Peer reviewed

M Webb, C Jeynes, R Gwilliam, A Royle and B Sealy

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.249(1-2), pp.429-431

08/2006

Abstract

Ion-cut

Smart-cut

Exfoliation

Blistering

url

http://dx.doi.org/10.1016/j.nimb.2006.04.045View

Published (Version of record)

url

http://www.sciencedirect.com/science/article/B6TJN-4K7NHDH-1/2/b58de8c0aad4f9945d37b1ba933f4fd8View

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Title: Characterising ion-cut in GaAs by Rutherford backscattering spectroscopy
Creators: M Webb
C Jeynes
R Gwilliam
A Royle
B Sealy
Publication Details: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.249(1-2), pp.429-431
Publisher: Elsevier
Date published: 08/2006
Date submitted: 12/08/2013
Identifiers: 99511506702346
Academic Unit: Department of Chemistry
Resource Type: Journal article