Accurate ion beam analysis in the presence of surface roughness

SL Molodtsov; AF Gurbich; C Jeynes

doi:10.1088/0022-3727/41/20/205303

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Accurate ion beam analysis in the presence of surface roughness

Journal article

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Accurate ion beam analysis in the presence of surface roughness

SL Molodtsov, AF Gurbich and C Jeynes

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.41(20), pp.?-?

21/10/2008

DOI: https://doi.org/10.1088/0022-3727/41/20/205303

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

RUTHERFORD BACKSCATTERING SPECTROSCOPY

DEPTH PROFILES

THIN-FILMS

SIMULATION

ERDA

RBS

SPECTRA

SILICON

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Title: Accurate ion beam analysis in the presence of surface roughness
Creators: SL Molodtsov
AF Gurbich
C Jeynes
Publication Details: JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.41(20), pp.?-?
Publisher: IOP PUBLISHING LTD
Date published: 21/10/2008
Date submitted: 23/10/2014
Identifiers: 99516974002346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

Accurate ion beam analysis in the presence of surface roughness

Abstract

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