Accurate RBS measurements of the indium content of InGaAs thin films

C Jeynes; ZH Jafri; RP Webb; AC Kimber; MJ Ashwin

doi:10.1002/(SICI)1096-9918(199704)25:4<254::AID-SIA232>3.0.CO;2-F

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Accurate RBS measurements of the indium content of InGaAs thin films

Journal article

Peer reviewed

Accurate RBS measurements of the indium content of InGaAs thin films

C Jeynes, ZH Jafri, RP Webb, AC Kimber and MJ Ashwin

SURFACE AND INTERFACE ANALYSIS, Vol.25(4), pp.254-260

01/04/1997

DOI: https://doi.org/10.1002/(SICI)1096-9918(199704)25:4<254::AID-SIA232>3.0.CO;2-F

Abstract

Science & Technology

Physical Sciences

Chemistry

Physical

Chemistry

CHEMISTRY

PHYSICAL

InGaAs

RBS

absolute composition determination

measurement accuracy

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Title: Accurate RBS measurements of the indium content of InGaAs thin films
Creators: C Jeynes
ZH Jafri
RP Webb
AC Kimber
MJ Ashwin
Publication Details: SURFACE AND INTERFACE ANALYSIS, Vol.25(4), pp.254-260
Publisher: JOHN WILEY & SONS LTD
Date published: 01/04/1997
Date submitted: 17/05/2017
Identifiers: 99514054202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Accurate RBS measurements of the indium content of InGaAs thin films

Abstract

Files and links (1)

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