AUGER-ELECTRON SPECTROSCOPY X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF TI-B-N THIN-FILMS

MA BAKER; A STEINER; J HAUPT; W GISSLER

doi:10.1116/1.579743

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AUGER-ELECTRON SPECTROSCOPY X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF TI-B-N THIN-FILMS

Journal article

Peer reviewed

AUGER-ELECTRON SPECTROSCOPY X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF TI-B-N THIN-FILMS

MA BAKER, A STEINER, J HAUPT and W GISSLER

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.13(3), pp.1633-1638

01/05/1995

DOI: https://doi.org/10.1116/1.579743

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Coatings & Films

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

COATINGS

DEPOSITION

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Title: AUGER-ELECTRON SPECTROSCOPY X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF TI-B-N THIN-FILMS
Creators: MA BAKER
A STEINER
J HAUPT
W GISSLER
Publication Details: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.13(3), pp.1633-1638
Publisher: AMER INST PHYSICS
Date published: 01/05/1995
Date submitted: 17/05/2017
Identifiers: 99510949902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

AUGER-ELECTRON SPECTROSCOPY X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF TI-B-N THIN-FILMS

Abstract

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