Surrey researchers Sign in
Control of Focused Electron Beams for Microcircuit Manufacture.
Doctoral Thesis   Open access

Control of Focused Electron Beams for Microcircuit Manufacture.

M. J. Underhill
University of Surrey
Doctor of Philosophy (PhD), University of Surrey (United Kingdom).
1971

Abstract

pdf
1080408010.54 MBDownloadView
TextCC BY-NC-SA V4.0 Open Access

Metrics

83 File views/ downloads
63 Record Views

Details

Usage Policy