Abstract
Proton beam writing is a direct write lithographic technique that uses finely focused MeV proton beams to create structures in a target material. The depth the protons travel in a material is dependent on its energy, this unique property of proton beams allow multi level structures to be created in materials. PBW has been demonstrated successfully on semiconductor materials, glass and polymers. This thesis is a study of the application of PBW in creating Micro Electro-Mechanical Systems (MEMS) in a polymer SU 8 and SU 8 polymer nano composite with silver, and shows experimental steps, theory and computer simulations involved in creating an electrostatic actuated micro-gripping device. Proton beam writing in silver SU 8 composite results in the creation of electrically conducting microstructures. The unique predictability of the range of protons in materials is leveraged in the creating of free standing conducting cantilevers structures which are used as the building blocks for a micro gripping device. The electrostatic actuation has been modelled using a finite element modelling software Sugar 3.1, and the results are comparable with actual actuations in a realized micro-gripping device.