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beta-SiC-on insulator waveguide structures for modulators and sensor systems
Conference presentation   Peer reviewed

beta-SiC-on insulator waveguide structures for modulators and sensor systems

A Vonsovici, GT Reed and AGR Evans
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, Vol.3(5-6), pp.367-374
Spring Meeting of the European-Materials-Research-Society (STRASBOURG, FRANCE, 01/06/1999 - 04/06/1999)
01/10/2000
DOI: https://doi.org/10.1016/S1369-8001(00)00060-3

Abstract

Science & Technology Technology Physical Sciences Engineering Electrical & Electronic Materials Science Multidisciplinary Physics Applied Physics Condensed Matter Engineering Materials Science Physics ENGINEERING ELECTRICAL & ELECTRONIC MATERIALS SCIENCE MULTIDISCIPLINARY PHYSICS APPLIED PHYSICS CONDENSED MATTER Si-based optoelectronics silicon on insulator active devices optical modulators and switches SiC rib waveguides Pockels effect high-speed modulators SILICON-CARBIDE
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