Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond

BG de la Mata; MG Dowsett; V Palitsin

doi:10.1002/pssa.200561905

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Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond

Conference presentation

Peer reviewed

Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond

BG de la Mata, MG Dowsett and V Palitsin

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, Vol.202(11), pp.2148-2153

10th International Workshop on Surface and Bulk Defects in CVD Diamond Films (Diepenbee-Hasselt, BELGIUM, 23/02/2005 - 25/02/2005)

01/09/2005

DOI: https://doi.org/10.1002/pssa.200561905

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

DEPTH PROFILES

BOMBARDMENT

SIMULATION

DISTORTION

SOLIDS

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Title: Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond
Creators: BG de la Mata
MG Dowsett
V Palitsin
Contributors: WILEY-V C H VERLAG GMBH (Publisher)
Publication Details: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, Vol.202(11), pp.2148-2153
Conference: 10th International Workshop on Surface and Bulk Defects in CVD Diamond Films (Diepenbee-Hasselt, BELGIUM, 23/02/2005 - 25/02/2005)
Date published: 01/09/2005
Date submitted: 17/05/2017
Identifiers: 99514149102346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond

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