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Thin amorphous gallium nitride films formed by ion beam synthesis
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Thin amorphous gallium nitride films formed by ion beam synthesis

SRP Silva, SA Almeida and BJ Sealy
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.147(1-4), pp.388-392
Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, at the Spring Meeting of the European-Materials-Research-Society (STRASBOURG, FRANCE, 16/06/1998 - 19/06/1998)
01/01/1999

Abstract

Science & Technology Technology Physical Sciences Instruments & Instrumentation Nuclear Science & Technology Physics Atomic Molecular & Chemical Physics Nuclear Physics INSTRUMENTS & INSTRUMENTATION NUCLEAR SCIENCE & TECHNOLOGY PHYSICS ATOMIC MOLECULAR & CHEMICAL PHYSICS NUCLEAR amorphous semiconductors ion implantation amorphous gallium nitride thin films silicon nitride
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