Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

F Dauchy; RA Dorey

doi:10.1007/s10832-007-9317-x

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Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

Conference presentation

Peer reviewed

Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

F Dauchy and RA Dorey

JOURNAL OF ELECTROCERAMICS, Vol.19(4), pp.383-386

Piezoceramics for End Users II Conference (Hafjell, NORWAY, 05/03/2006 - 08/03/2006)

01/12/2007

DOI: https://doi.org/10.1007/s10832-007-9317-x

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

PZT

thick Film

ultrasound

transducer

pMUT

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Title: Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers
Creators: F Dauchy
RA Dorey
Contributors: SPRINGER (Publisher)
Publication Details: JOURNAL OF ELECTROCERAMICS, Vol.19(4), pp.383-386
Conference: Piezoceramics for End Users II Conference (Hafjell, NORWAY, 05/03/2006 - 08/03/2006)
Date published: 01/12/2007
Date submitted: 17/05/2017
Identifiers: 99512332502346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

Abstract

Files and links (1)

Metrics

Details

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