- Title
- The Dielectric Properties of Co-Implanted SiO(2) Investigated Using Spatially-Resolved EELS
- Creators
- V StolojanW TsangSRP SilvaAG CullisPA Midgley
- Contributors
- SPRINGER-VERLAG BERLIN (null)
- Publication Details
- MICROSCOPY OF SEMICONDUCTING MATERIALS 2007, Vol.120, pp.341-344
- Conference
- 15th Conference on Microscopy of Semiconducting Materials (Univ Cambridge, Cambridge, ENGLAND, 02/04/2007 - 05/04/2007)
- Date published
- 01/01/2008
- Date submitted
- 11/01/2013
- Identifiers
- 99514855702346
- Academic Unit
- School of Computer Science and Electronic Engineering
- Resource Type
- Conference presentation
Conference presentation
The Dielectric Properties of Co-Implanted SiO(2) Investigated Using Spatially-Resolved EELS
MICROSCOPY OF SEMICONDUCTING MATERIALS 2007, Vol.120, pp.341-344
15th Conference on Microscopy of Semiconducting Materials (Univ Cambridge, Cambridge, ENGLAND, 02/04/2007 - 05/04/2007)
01/01/2008
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