- Title
- THE USE OF PIXE AND STIM IN MICROELECTRONICS ANALYSIS
- Creators
- MBH BREESEGW GRIMEF WATT
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.75(1-4), pp.341-346
- Conference
- 6TH INTERNATIONAL CONF ON PIXE ( PARTICLE INDUCED X-RAY EMISSION ) AND ITS ANALYTICAL APPLICATIONS (WASADEA UNIV CONF HALL, TOKYO, JAPAN, 20/07/1992 - 24/07/1992)
- Date published
- 01/04/1993
- Date submitted
- 17/05/2017
- Identifiers
- 99511167902346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
THE USE OF PIXE AND STIM IN MICROELECTRONICS ANALYSIS
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.75(1-4), pp.341-346
6TH INTERNATIONAL CONF ON PIXE ( PARTICLE INDUCED X-RAY EMISSION ) AND ITS ANALYTICAL APPLICATIONS (WASADEA UNIV CONF HALL, TOKYO, JAPAN, 20/07/1992 - 24/07/1992)
01/04/1993
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