Surface characterisation of silicon based MEMS

J Li; Z Cui; MA Baker

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Surface characterisation of silicon based MEMS

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Surface characterisation of silicon based MEMS

J Li, Z Cui and MA Baker

CHEMICAL RESEARCH IN CHINESE UNIVERSITIES, Vol.20(4), pp.407-410

10th Joint Conference of Chinese-Society-of-Chemical-Science-and-Technology/United-Kingdom-Society-of-Chemical-Society (Univ Coll London, Logrono, ENGLAND, 13/09/2003)

01/07/2004

Abstract

Science & Technology

Physical Sciences

Chemistry

Multidisciplinary

Chemistry

CHEMISTRY

MULTIDISCIPLINARY

microelectromechanical systems

XPS

atomic force microscopy

ATOMIC-FORCE MICROSCOPY

MONOLAYER FILMS

SIO2

IV

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Title: Surface characterisation of silicon based MEMS
Creators: J Li
Z Cui
MA Baker
Contributors: HIGHER EDUCATION PRESS (Publisher)
Publication Details: CHEMICAL RESEARCH IN CHINESE UNIVERSITIES, Vol.20(4), pp.407-410
Conference: 10th Joint Conference of Chinese-Society-of-Chemical-Science-and-Technology/United-Kingdom-Society-of-Chemical-Society (Univ Coll London, Logrono, ENGLAND, 13/09/2003)
Date published: 01/07/2004
Date submitted: 17/05/2017
Identifiers: 99515517702346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Surface characterisation of silicon based MEMS

Abstract

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