Surface amorphization of machined silicon

K Puttick; C Jeynes; T Gee

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Conference presentation

Surface amorphization of machined silicon

K Puttick, C Jeynes and T Gee

PROCEEDINGS OF: SILICON MACHINING, pp.15-18

1998 Spring Topical Meeting of the ASPE on Silicon Machining (CARMEL BY THE SEA, CA, 13/04/1998 - 16/04/1998)

01/01/1998

Abstract

Science & Technology

Technology

Engineering

Manufacturing

Engineering

Mechanical

Materials Science

Multidisciplinary

Engineering

Materials Science

CRYSTAL

DAMAGE

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Title: Surface amorphization of machined silicon
Creators: K Puttick
C Jeynes
T Gee
Contributors: AMER SOC PRECISION ENGINEERING (Publisher)
Publication Details: PROCEEDINGS OF: SILICON MACHINING, pp.15-18
Conference: 1998 Spring Topical Meeting of the ASPE on Silicon Machining (CARMEL BY THE SEA, CA, 13/04/1998 - 16/04/1998)
Date published: 01/01/1998
Date submitted: 17/05/2017
Identifiers: 99513920202346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Surface amorphization of machined silicon

Abstract

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