Structural characterization of hard a-C : H films as a function of the methane pressure

RG Lacerda; V Stolojan; DC Cox; SRP Silva; FC Marques

doi:10.1016/S0925-9635(01)00677-X

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Structural characterization of hard a-C : H films as a function of the methane pressure

Conference presentation

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Structural characterization of hard a-C : H films as a function of the methane pressure

RG Lacerda, V Stolojan, DC Cox, SRP Silva and FC Marques

DIAMOND AND RELATED MATERIALS, Vol.11(3-6), pp.980-984

12th European Conference on Diamond Diamond-Like Materials Carbon Nanotubes Nitrides and Silicon Carbide (Diamond 2001) (BUDAPEST, HUNGARY, 02/09/2001 - 07/09/2001)

01/03/2002

DOI: https://doi.org/10.1016/S0925-9635(01)00677-X

Abstract

Science & Technology

Technology

Materials Science

Multidisciplinary

Materials Science

MATERIALS SCIENCE

MULTIDISCIPLINARY

diamond-like carbon

hardness

stress

mechanical properties

AMORPHOUS HYDROGENATED CARBON

DIAMOND-LIKE CARBON

STRESS REDUCTION

THIN-FILMS

DEPOSITION

DISCHARGES

SPECTRA

ENERGY

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Title: Structural characterization of hard a-C : H films as a function of the methane pressure
Creators: RG Lacerda
V Stolojan
DC Cox
SRP Silva
FC Marques
Contributors: ELSEVIER SCIENCE SA (Publisher)
Publication Details: DIAMOND AND RELATED MATERIALS, Vol.11(3-6), pp.980-984
Conference: 12th European Conference on Diamond Diamond-Like Materials Carbon Nanotubes Nitrides and Silicon Carbide (Diamond 2001) (BUDAPEST, HUNGARY, 02/09/2001 - 07/09/2001)
Date published: 01/03/2002
Date submitted: 17/05/2017
Identifiers: 99511498802346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Structural characterization of hard a-C : H films as a function of the methane pressure

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