Small devices in SOI: fabrication and design issues

GT Reed; GZ Masanovic; WR Headley; CE Png; SP Chan; ST Lim; VMN Passaro; D Hak; O Cohen; M Paniccia

doi:10.1117/12.527422

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Small devices in SOI: fabrication and design issues

GT Reed, GZ Masanovic, WR Headley, CE Png, SP Chan, ST Lim, VMN Passaro, D Hak, O Cohen and M Paniccia

OPTOELECTRONIC INTEGRATION ON SILICON, Vol.5357, pp.75-86

Conference on Optoelectronic Integration on Silicon (San Jose, CA, 27/01/2004 - 28/01/2004)

01/01/2004

DOI: https://doi.org/10.1117/12.527422

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Electrical & Electronic

Instruments & Instrumentation

Optics

Engineering

grating couplet

phase modulator

thermo-optic effect

photonic circuits

integrated optics

optical coupling

optical waveguides

silicon on insulator

ring resonator

RIB WAVE-GUIDES

FIBERS

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Title: Small devices in SOI: fabrication and design issues
Creators: GT Reed
GZ Masanovic
WR Headley
CE Png
SP Chan
ST Lim
VMN Passaro
D Hak
O Cohen
M Paniccia
Contributors: DJ Robbins
GE Jabbour
SPIE-INT SOC OPTICAL ENGINEERING (Publisher)
Publication Details: OPTOELECTRONIC INTEGRATION ON SILICON, Vol.5357, pp.75-86
Conference: Conference on Optoelectronic Integration on Silicon (San Jose, CA, 27/01/2004 - 28/01/2004)
Date published: 01/01/2004
Date submitted: 17/05/2017
Identifiers: 99515281102346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Small devices in SOI: fabrication and design issues

Abstract

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