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Self-assembled germanium islands grown on (001) silicon substrates by low-pressure chemical vapor deposition
Conference presentation   Peer reviewed

Self-assembled germanium islands grown on (001) silicon substrates by low-pressure chemical vapor deposition

GDM Dilliway, DM Bagnall, NEB Cowern and C Jeynes
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, Vol.14(5-7), pp.323-327
4th International Conference on Materials for Microelectronics and Nanoengineering (ESPOO, FINLAND, 10/06/2002 - 12/06/2002)
01/05/2003
DOI: https://doi.org/10.1023/A:1023975928759

Abstract

Science & Technology Technology Physical Sciences Engineering Electrical & Electronic Materials Science Multidisciplinary Physics Applied Physics Condensed Matter Engineering Materials Science Physics ENGINEERING ELECTRICAL & ELECTRONIC MATERIALS SCIENCE MULTIDISCIPLINARY PHYSICS APPLIED PHYSICS CONDENSED MATTER GE ISLANDS SIZE DISTRIBUTION SI(001) DOTS
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