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Relaxation of strained epitaxial layers by dislocation rotation, reaction and generation during annealing
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Relaxation of strained epitaxial layers by dislocation rotation, reaction and generation during annealing

R Beanland, MA Lourenco and KP Homewood
MICROSCOPY OF SEMICONDUCTING MATERIALS 1997, (157), pp.145-148
Royal-Microscopical-Society Conference on Microscopy of Semiconducting Materials (UNIV OXFORD, OXFORD, ENGLAND, 07/04/1997 - 10/04/1997)
01/01/1997

Abstract

Science & Technology Technology Physical Sciences Microscopy Physics Multidisciplinary Physics Condensed Matter Physics EPILAYERS
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