Properties of amorphous a-CH(: N) films synthesized by direct ion beam deposition and plasma-assisted chemical vapour deposition

C Lenardi; MA Baker; V Briois; L Nobili; P Piseri; W Gissler

doi:10.1016/S0925-9635(98)00284-2

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Properties of amorphous a-CH(: N) films synthesized by direct ion beam deposition and plasma-assisted chemical vapour deposition

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Properties of amorphous a-CH(: N) films synthesized by direct ion beam deposition and plasma-assisted chemical vapour deposition

C Lenardi, MA Baker, V Briois, L Nobili, P Piseri and W Gissler

DIAMOND AND RELATED MATERIALS, Vol.8(2-5), pp.595-600

9th European Conference on Diamond, Diamond-like Materials, Nitrides and Silicon Carbide (Diamond 1998) (IRAKLION, GREECE, 13/09/1998 - 18/09/1998)

01/03/1999

DOI: https://doi.org/10.1016/S0925-9635(98)00284-2

Abstract

Science & Technology

Technology

Materials Science

Multidisciplinary

Materials Science

MATERIALS SCIENCE

MULTIDISCIPLINARY

amorphous hydrogenated carbon

NEXAFS

nitrogen

sp(2) bonding

DIAMOND-LIKE CARBON

THIN-FILMS

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Title: Properties of amorphous a-CH(: N) films synthesized by direct ion beam deposition and plasma-assisted chemical vapour deposition
Creators: C Lenardi
MA Baker
V Briois
L Nobili
P Piseri
W Gissler
Contributors: ELSEVIER SCIENCE SA (Publisher)
Publication Details: DIAMOND AND RELATED MATERIALS, Vol.8(2-5), pp.595-600
Conference: 9th European Conference on Diamond, Diamond-like Materials, Nitrides and Silicon Carbide (Diamond 1998) (IRAKLION, GREECE, 13/09/1998 - 18/09/1998)
Date published: 01/03/1999
Date submitted: 17/05/2017
Identifiers: 99513721302346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Properties of amorphous a-CH(: N) films synthesized by direct ion beam deposition and plasma-assisted chemical vapour deposition

Abstract

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