Surrey researchers Sign in
Back
Process improvement in the microelectronic industry by a state space modelling
Conference presentation   Peer reviewed

Process improvement in the microelectronic industry by a state space modelling

K Triantafyllopoulos, JD Godolphin and Edward Godolphin
QUALITY AND RELIABILITY ENGINEERING INTERNATIONAL, Vol.21(5), pp.465-475
4th Annual Meeting of the European-Network-of-Business-and-Industrial-Statisticians (Copenhagen, DENMARK, 09/2004)
01/08/2005
DOI: https://doi.org/10.1002/qre.734

Abstract

Science & Technology Technology Engineering Multidisciplinary Engineering Industrial Operations Research & Management Science Engineering ENGINEERING INDUSTRIAL ENGINEERING MULTIDISCIPLINARY OPERATIONS RESEARCH & MANAGEMENT SCIENCE exponentially weighted moving average feedback adjustment Kalman filter local-level model nitride layers process improvement state space models stochastic drift time series FEEDBACK ADJUSTMENT EWMA CONTROLLER
url
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000231043300005&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View
Author

Metrics

31 Record Views

Details

Usage Policy

Usage details for all content viewed and downloaded in this site are shared with IRUS-UK (Institutional Repository Usage Statistics UK). Cookies are used to remember your decision. Click Accept to accept usage details sharing and the cookies.

Learn more