Piezoelectric PZT films for MEMS and their characterization by interferometry

Z Huang; Q Zhang; S Corkovic; RA Dorey; F Duval; G Leighton; R Wright; P Kirby; RW Whatmore

doi:10.1007/s10832-006-6707-4

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Piezoelectric PZT films for MEMS and their characterization by interferometry

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Piezoelectric PZT films for MEMS and their characterization by interferometry

Z Huang, Q Zhang, S Corkovic, RA Dorey, F Duval, G Leighton, R Wright, P Kirby and RW Whatmore

JOURNAL OF ELECTROCERAMICS, Vol.17(2-4), pp.549-556

2nd International Conference on Electroceramics (ICE-2005) (Seoul, SOUTH KOREA, 12/06/2005 - 16/06/2005)

01/12/2006

DOI: https://doi.org/10.1007/s10832-006-6707-4

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

PZT

piezoelectric coefficients

interferometer

laser scanning vibrometer

sol-gel

THIN-FILMS

ELECTROSTRICTIVE STRAINS

LASER INTERFEROMETER

COEFFICIENT

CERAMICS

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Title: Piezoelectric PZT films for MEMS and their characterization by interferometry
Creators: Z Huang
Q Zhang
S Corkovic
RA Dorey
F Duval
G Leighton
R Wright
P Kirby
RW Whatmore
Contributors: SPRINGER (Publisher)
Publication Details: JOURNAL OF ELECTROCERAMICS, Vol.17(2-4), pp.549-556
Conference: 2nd International Conference on Electroceramics (ICE-2005) (Seoul, SOUTH KOREA, 12/06/2005 - 16/06/2005)
Date published: 01/12/2006
Date submitted: 17/05/2017
Identifiers: 99511448802346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Piezoelectric PZT films for MEMS and their characterization by interferometry

Abstract

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