PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION

M MILOSAVLJEVIC; N BIBIC; D PERUSKO; IH WILSON; C JEYNES

doi:10.1016/0257-8972(90)90038-E

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PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION

Conference presentation

Peer reviewed

PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION

M MILOSAVLJEVIC, N BIBIC, D PERUSKO, IH WILSON and C JEYNES

SURFACE & COATINGS TECHNOLOGY, Vol.43-4(1-3), pp.996-1006

17TH INTERNATIONAL CONF ON METALLURGICAL COATINGS / 8TH INTERNATIONAL CONF ON THIN FILMS (SAN DIEGO, CA, 02/04/1990 - 06/04/1990)

10/12/1990

DOI: https://doi.org/10.1016/0257-8972(90)90038-E

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Coatings & Films

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

SI

FILMS

TISI2

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Title: PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION
Creators: M MILOSAVLJEVIC
N BIBIC
D PERUSKO
IH WILSON
C JEYNES
Contributors: ELSEVIER SCIENCE SA LAUSANNE (Publisher)
Publication Details: SURFACE & COATINGS TECHNOLOGY, Vol.43-4(1-3), pp.996-1006
Conference: 17TH INTERNATIONAL CONF ON METALLURGICAL COATINGS / 8TH INTERNATIONAL CONF ON THIN FILMS (SAN DIEGO, CA, 02/04/1990 - 06/04/1990)
Date published: 10/12/1990
Date submitted: 17/05/2017
Identifiers: 99516749002346
Academic Unit: University of Surrey
Resource Type: Conference presentation

PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION

Abstract

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