- Title
- New developments on the Surrey microbeam applications to lithography
- Creators
- P MistryI Gornez-MorillaGW GrimeR WebbC JeynesR GwilliamA CansellM MerchantKJ Kirkby
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.231, pp.428-432
- Conference
- 9th International Conference on Nuclear Microprobe Technology and Applications (Cavtat, CROATIA, 13/09/2004 - 17/09/2004)
- Date published
- 01/04/2005
- Date submitted
- 17/05/2017
- Identifiers
- 99513756102346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
New developments on the Surrey microbeam applications to lithography
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.231, pp.428-432
9th International Conference on Nuclear Microprobe Technology and Applications (Cavtat, CROATIA, 13/09/2004 - 17/09/2004)
01/04/2005
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