- Title
- Maskless fabrication of 3-dimensional microstructures in PMMA using a nuclear microprobe
- Creators
- DG de KerckhoveMBH BreeseMA MarshGW Grime
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.136, pp.379-384
- Conference
- 13th International Conference on Ion Beam Analysis (IBA-13) (LISBON, PORTUGAL, 27/07/1997 - 01/08/1997)
- Date published
- 01/03/1998
- Date submitted
- 17/05/2017
- Identifiers
- 99513049602346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Maskless fabrication of 3-dimensional microstructures in PMMA using a nuclear microprobe
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.136, pp.379-384
13th International Conference on Ion Beam Analysis (IBA-13) (LISBON, PORTUGAL, 27/07/1997 - 01/08/1997)
01/03/1998
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