MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER

MI CURRENT; T GUITNER; N OHNO; K HURLEY; WA KEENAN; W JOHNSON; RJ HILLARD; C JEYNES

doi:10.1016/0168-583X(91)96156-F

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MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER

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MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER

MI CURRENT, T GUITNER, N OHNO, K HURLEY, WA KEENAN, W JOHNSON, RJ HILLARD and C JEYNES

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.55(1-4), pp.173-177

8TH INTERNATIONAL CONF ON ION IMPLANTATION TECHNOLOGY (UNIV SURREY, GUILDFORD, ENGLAND, 30/07/1990 - 03/08/1990)

01/04/1991

DOI: https://doi.org/10.1016/0168-583X(91)96156-F

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

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Title: MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER
Creators: MI CURRENT
T GUITNER
N OHNO
K HURLEY
WA KEENAN
W JOHNSON
RJ HILLARD
C JEYNES
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.55(1-4), pp.173-177
Conference: 8TH INTERNATIONAL CONF ON ION IMPLANTATION TECHNOLOGY (UNIV SURREY, GUILDFORD, ENGLAND, 30/07/1990 - 03/08/1990)
Date published: 01/04/1991
Date submitted: 17/05/2017
Identifiers: 99516771902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER

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