Laser annealing of sputtered silicon for wafer-bonding applications

RE Hurley; HS Gamble; M-H Jin; BM Armstrong; M Ghita; RW McCullough; AADT Adikaari; SJ Henley; SRP Silva

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Laser annealing of sputtered silicon for wafer-bonding applications

Conference presentation

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Laser annealing of sputtered silicon for wafer-bonding applications

RE Hurley, HS Gamble, M-H Jin, BM Armstrong, M Ghita, RW McCullough, AADT Adikaari, SJ Henley and SRP Silva

JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, Vol.9(1), pp.121-126

14th International School on Condensed Matter Physics (Varna, BULGARIA, 17/09/2006 - 22/09/2006)

01/01/2007

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Optics

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

OPTICS

PHYSICS

APPLIED

silicon

sputter

laser anneal

excimer

wafer bonding

layer transfer

POLYCRYSTALLINE SILICON

CRYSTALLINE SILICON

AMORPHOUS-SILICON

ARGON

FILMS

SI

TECHNOLOGY

ROUGHNESS

SURFACES

DAMAGE

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Title: Laser annealing of sputtered silicon for wafer-bonding applications
Creators: RE Hurley
HS Gamble
M-H Jin
BM Armstrong
M Ghita
RW McCullough
AADT Adikaari
SJ Henley
SRP Silva
Contributors: NATL INST OPTOELECTRONICS (Publisher)
Publication Details: JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, Vol.9(1), pp.121-126
Conference: 14th International School on Condensed Matter Physics (Varna, BULGARIA, 17/09/2006 - 22/09/2006)
Date published: 01/01/2007
Date submitted: 17/05/2017
Identifiers: 99511055502346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Laser annealing of sputtered silicon for wafer-bonding applications

Abstract

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