Ion beam synthesis of gallium nitride

PJ Kench; JM Shannon; G Shao; P Tsakiropoulos; SRP Silva

doi:10.1016/S0168-583X(01)00345-7

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Ion beam synthesis of gallium nitride

PJ Kench, JM Shannon, G Shao, P Tsakiropoulos and SRP Silva

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.175, pp.678-682

12th International Conference on Ion Beam Modification of Materials (IBMM2000) (CANELA, BRAZIL, 03/09/2000 - 08/09/2000)

01/04/2001

DOI: https://doi.org/10.1016/S0168-583X(01)00345-7

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

ion implantation

gallium nitride

aluminium gallium nitride

thin films

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Title: Ion beam synthesis of gallium nitride
Creators: PJ Kench
JM Shannon
G Shao
P Tsakiropoulos
SRP Silva
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.175, pp.678-682
Conference: 12th International Conference on Ion Beam Modification of Materials (IBMM2000) (CANELA, BRAZIL, 03/09/2000 - 08/09/2000)
Date published: 01/04/2001
Date submitted: 17/05/2017
Identifiers: 99511326402346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Ion beam synthesis of gallium nitride

Abstract

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