- Title
- Ion beam deposited carbon nitride films: Characterization and identification of chemical sputtering
- Creators
- P HammerMA BakerC LenardiW Gissler
- Contributors
- ELSEVIER SCIENCE SA (Publisher)
- Publication Details
- THIN SOLID FILMS, Vol.290, pp.107-111
- Conference
- 23rd International Conference on Metallurgical Coatings and Thin Films (SAN DIEGO, CA, 22/04/1996 - 26/04/1996)
- Date published
- 15/12/1996
- Date submitted
- 17/05/2017
- Identifiers
- 99510961702346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Ion beam deposited carbon nitride films: Characterization and identification of chemical sputtering
THIN SOLID FILMS, Vol.290, pp.107-111
23rd International Conference on Metallurgical Coatings and Thin Films (SAN DIEGO, CA, 22/04/1996 - 26/04/1996)
15/12/1996
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