INFLUENCE OF ARSENIC ION-IMPLANTATION ON THE FORMATION OF TI-SILICIDES

M MILOSAVLJEVIC; N BIBIC; D PERUSKO; C JEYNES

doi:10.1016/0042-207X(95)00094-1

Back

INFLUENCE OF ARSENIC ION-IMPLANTATION ON THE FORMATION OF TI-SILICIDES

Conference presentation

Peer reviewed

INFLUENCE OF ARSENIC ION-IMPLANTATION ON THE FORMATION OF TI-SILICIDES

M MILOSAVLJEVIC, N BIBIC, D PERUSKO and C JEYNES

VACUUM, Vol.46(8-10), pp.1009-1012

4th European Vacuum Conference (EVC-4)1st Swedish Vacuum Meeting (SVM-1) (UPPSALA, SWEDEN, 13/06/1994 - 17/06/1994)

01/08/1995

DOI: https://doi.org/10.1016/0042-207X(95)00094-1

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

SILICON

TISI2

SUBSTRATE

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1995RR06300066&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

31 Record Views

Details

Title: INFLUENCE OF ARSENIC ION-IMPLANTATION ON THE FORMATION OF TI-SILICIDES
Creators: M MILOSAVLJEVIC
N BIBIC
D PERUSKO
C JEYNES
Contributors: PERGAMON-ELSEVIER SCIENCE LTD (Publisher)
Publication Details: VACUUM, Vol.46(8-10), pp.1009-1012
Conference: 4th European Vacuum Conference (EVC-4)1st Swedish Vacuum Meeting (SVM-1) (UPPSALA, SWEDEN, 13/06/1994 - 17/06/1994)
Date published: 01/08/1995
Date submitted: 17/05/2017
Identifiers: 99511094302346
Academic Unit: University of Surrey
Resource Type: Conference presentation

INFLUENCE OF ARSENIC ION-IMPLANTATION ON THE FORMATION OF TI-SILICIDES

Abstract

Files and links (1)

Metrics

Details

Usage Policy