Fabrication of optical ring resonators in silicon on insulator

WR Headley; GT Reed; AS Liu; O Cohen; D Hak; M Paniccia; S Howe; I Huille

doi:10.1117/12.527420

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Fabrication of optical ring resonators in silicon on insulator

WR Headley, GT Reed, AS Liu, O Cohen, D Hak, M Paniccia, S Howe and I Huille

OPTOELECTRONIC INTEGRATION ON SILICON, Vol.5357, pp.67-74

Conference on Optoelectronic Integration on Silicon (San Jose, CA, 27/01/2004 - 28/01/2004)

01/01/2004

DOI: https://doi.org/10.1117/12.527420

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Electrical & Electronic

Instruments & Instrumentation

Optics

Engineering

Silicon On Insulator (SOI)

ring resonators

silicon photonics

rib waveguides

MICRORING RESONATOR

SOI

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Title: Fabrication of optical ring resonators in silicon on insulator
Creators: WR Headley
GT Reed
AS Liu
O Cohen
D Hak
M Paniccia
S Howe
I Huille
Contributors: DJ Robbins
GE Jabbour
SPIE-INT SOC OPTICAL ENGINEERING (Publisher)
Publication Details: OPTOELECTRONIC INTEGRATION ON SILICON, Vol.5357, pp.67-74
Conference: Conference on Optoelectronic Integration on Silicon (San Jose, CA, 27/01/2004 - 28/01/2004)
Date published: 01/01/2004
Date submitted: 17/05/2017
Identifiers: 99515373802346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Fabrication of optical ring resonators in silicon on insulator

Abstract

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