- Title
- Electrical profiles of 20 nm junctions in Sb implanted silicon
- Creators
- T AlzankiR GwilliamN EmersonA SmithR WebbBJ Sealy
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.242(1-2), pp.693-695
- Conference
- 14th International Conference on Ion Beam Modification of Materials (IBMM 2004) (Pacific Grove, CA, 05/09/2004 - 10/09/2004)
- Date published
- 01/01/2006
- Date submitted
- 17/05/2017
- Identifiers
- 99516047002346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Electrical profiles of 20 nm junctions in Sb implanted silicon
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.242(1-2), pp.693-695
14th International Conference on Ion Beam Modification of Materials (IBMM 2004) (Pacific Grove, CA, 05/09/2004 - 10/09/2004)
01/01/2006
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