Doping of rf plasma deposited diamond-like carbon films

SRP Silva; GAJ Amaratunga

doi:10.1016/0040-6090(95)06915-1

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Doping of rf plasma deposited diamond-like carbon films

Conference presentation

Peer reviewed

Doping of rf plasma deposited diamond-like carbon films

SRP Silva and GAJ Amaratunga

THIN SOLID FILMS, Vol.270(1-2), pp.194-199

22nd International Conference on Metallurgical Coatings and Thin Films (ICMCTF 1995) (SAN DIEGO, CA, 24/04/1995 - 29/04/1995)

01/12/1995

DOI: https://doi.org/10.1016/0040-6090(95)06915-1

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

amorphous materials

carbon

electrical properties and measurements

optical properties

AMORPHOUS-CARBON

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Title: Doping of rf plasma deposited diamond-like carbon films
Creators: SRP Silva
GAJ Amaratunga
Contributors: ELSEVIER SCIENCE SA LAUSANNE (Publisher)
Publication Details: THIN SOLID FILMS, Vol.270(1-2), pp.194-199
Conference: 22nd International Conference on Metallurgical Coatings and Thin Films (ICMCTF 1995) (SAN DIEGO, CA, 24/04/1995 - 29/04/1995)
Date published: 01/12/1995
Date submitted: 17/05/2017
Identifiers: 99511232502346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Doping of rf plasma deposited diamond-like carbon films

Abstract

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