Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy

M Bowden; DJ Gardiner; MA Lourenco; J Hedley; D Wood; JS Burdess; AJ Harris

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Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy

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Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy

M Bowden, DJ Gardiner, MA Lourenco, J Hedley, D Wood, JS Burdess and AJ Harris

MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, Vol.518, pp.239-244

Symposium on Microelectromechanical Structures for Materials Research (SAN FRANCISCO, CA, 15/04/1998 - 16/04/1998)

01/01/1998

Abstract

Science & Technology

Technology

Engineering

Electrical & Electronic

Materials Science

Multidisciplinary

Metallurgy & Metallurgical Engineering

Materials Science

Characterization & Testing

Engineering

Materials Science

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Title: Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy
Creators: M Bowden
DJ Gardiner
MA Lourenco
J Hedley
D Wood
JS Burdess
AJ Harris
Contributors: S Brown
J Gilbert
H Guckel
R Howe
G Johnson
P Krulevitch
C Muhlstein
MATERIALS RESEARCH SOCIETY (Publisher)
Publication Details: MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, Vol.518, pp.239-244
Conference: Symposium on Microelectromechanical Structures for Materials Research (SAN FRANCISCO, CA, 15/04/1998 - 16/04/1998)
Date published: 01/01/1998
Date submitted: 17/05/2017
Identifiers: 99515004702346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy

Abstract

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