Direct patterning of photosensitive chemical solution deposition PZT layers

S Marson; RA Dorey; Q Zhang; RW Whatmore; A Hardy; J Mullens

doi:10.1016/S0955-2219(03)00543-0

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Direct patterning of photosensitive chemical solution deposition PZT layers

Conference presentation

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Direct patterning of photosensitive chemical solution deposition PZT layers

S Marson, RA Dorey, Q Zhang, RW Whatmore, A Hardy and J Mullens

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.24(6), pp.1925-1928

8th International Conference on Electronic Ceramics and Their Applications (ELECTROCERAMICS VIII) (Pontificia Univ Lateranensis, Rome, ITALY, 25/08/2002 - 28/08/2002)

01/01/2004

DOI: https://doi.org/10.1016/S0955-2219(03)00543-0

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

drying

films

photopatterning

PZT

sol-gel process

FILMS

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Title: Direct patterning of photosensitive chemical solution deposition PZT layers
Creators: S Marson
RA Dorey
Q Zhang
RW Whatmore
A Hardy
J Mullens
Contributors: ELSEVIER SCI LTD (Publisher)
Publication Details: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.24(6), pp.1925-1928
Conference: 8th International Conference on Electronic Ceramics and Their Applications (ELECTROCERAMICS VIII) (Pontificia Univ Lateranensis, Rome, ITALY, 25/08/2002 - 28/08/2002)
Date published: 01/01/2004
Date submitted: 17/05/2017
Identifiers: 99515136802346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Direct patterning of photosensitive chemical solution deposition PZT layers

Abstract

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