Dedicated Test Facility for Ion Beam Quality Evaluation and Spectroscopies

Conference presentation

Peer reviewed

M. Foad, D. Armour, Z. Kilmes, B. Hilton, J. Van den Berg, C. Cook, A. Chew, D. Sykes, Jonathan England, A. Devaney, …

Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994

Ion Implantation Technology 94 (IIT 94) (Catania, Italy, 13/06/1994 - 17/06/1994)

16/05/1995

Abstract

url

https://www.elsevier.com/books/ion-implantation-technology-94/coffa/978-0-444-82194-2View

Published (Version of record)

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Title: Dedicated Test Facility for Ion Beam Quality Evaluation and Spectroscopies
Creators: M. Foad
D. Armour
Z. Kilmes
B. Hilton
J. Van den Berg
C. Cook
A. Chew
D. Sykes
Jonathan England
A. Devaney
H. Ito
N. Bryan
F. Plumb
P. Kindersley
S. Moffatt
Contributors: S. Coffa
G. Ferla
E. Rimini
F. Priolo
Publication Details: Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994
Conference: Ion Implantation Technology 94 (IIT 94) (Catania, Italy, 13/06/1994 - 17/06/1994)
Date published: 16/05/1995
Date submitted: 15/06/2017
Identifiers: 99512619002346
Academic Unit: School of Computer Science and Electronic Engineering
Resource Type: Conference presentation