DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

SRP SILVA; KJ CLAY; SP SPEAKMAN; GAJ AMARATUNGA

doi:10.1016/0925-9635(94)00266-5

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DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

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DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

SRP SILVA, KJ CLAY, SP SPEAKMAN and GAJ AMARATUNGA

DIAMOND AND RELATED MATERIALS, Vol.4(7), pp.977-983

Diamond Films 94 (IL CIOCCO, ITALY, 25/09/1994 - 30/09/1994)

15/05/1995

DOI: https://doi.org/10.1016/0925-9635(94)00266-5

Abstract

Science & Technology

Technology

Materials Science

Multidisciplinary

Materials Science

MATERIALS SCIENCE

MULTIDISCIPLINARY

DOPING

DIAMOND-LIKE CARBON

ELECTRICAL PROPERTIES

AMORPHOUS HYDROGENATED CARBON

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Title: DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM
Creators: SRP SILVA
KJ CLAY
SP SPEAKMAN
GAJ AMARATUNGA
Contributors: ELSEVIER SCIENCE SA LAUSANNE (Publisher)
Publication Details: DIAMOND AND RELATED MATERIALS, Vol.4(7), pp.977-983
Conference: Diamond Films 94 (IL CIOCCO, ITALY, 25/09/1994 - 30/09/1994)
Date published: 15/05/1995
Date submitted: 17/05/2017
Identifiers: 99512268402346
Academic Unit: University of Surrey
Resource Type: Conference presentation

DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

Abstract

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