Comparison of boron halide, decaborane and B implants in Si from molecular dynamics simulations

RP Webb; SH Winston; RM Gwilliam; BJ Sealy; G Boudreault; C Jeynes; KJ Kirkby

doi:10.1016/S0168-583X(02)01844-X

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Comparison of boron halide, decaborane and B implants in Si from molecular dynamics simulations

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Comparison of boron halide, decaborane and B implants in Si from molecular dynamics simulations

RP Webb, SH Winston, RM Gwilliam, BJ Sealy, G Boudreault, C Jeynes and KJ Kirkby

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.202, pp.143-148

6th International Conference on Computer Simulation of Radiation Effects in Solids (DRESDEN, GERMANY, 23/06/2002 - 27/06/2002)

01/04/2003

DOI: https://doi.org/10.1016/S0168-583X(02)01844-X

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

molecular implantation

silicon processing

molecular dynamics

ion beams

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Title: Comparison of boron halide, decaborane and B implants in Si from molecular dynamics simulations
Creators: RP Webb
SH Winston
RM Gwilliam
BJ Sealy
G Boudreault
C Jeynes
KJ Kirkby
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.202, pp.143-148
Conference: 6th International Conference on Computer Simulation of Radiation Effects in Solids (DRESDEN, GERMANY, 23/06/2002 - 27/06/2002)
Date published: 01/04/2003
Date submitted: 17/05/2017
Identifiers: 99513853102346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Comparison of boron halide, decaborane and B implants in Si from molecular dynamics simulations

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