Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

P Colpo; G Ceccone; P Sauvageot; M Baker; F Rossi

doi:10.1116/1.582306

Back

Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

Conference presentation

Peer reviewed

Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

P Colpo, G Ceccone, P Sauvageot, M Baker and F Rossi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.18(4), pp.1096-1101

46th National Symposium of the American-Vacuum-Society (SEATTLE, WASHINGTON, 25/10/1999 - 29/10/1999)

01/07/2000

DOI: https://doi.org/10.1116/1.582306

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Coatings & Films

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

METAL

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000088276800011&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

39 Record Views

Details

Title: Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition
Creators: P Colpo
G Ceccone
P Sauvageot
M Baker
F Rossi
Contributors: AMER INST PHYSICS (Publisher)
Publication Details: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol.18(4), pp.1096-1101
Conference: 46th National Symposium of the American-Vacuum-Society (SEATTLE, WASHINGTON, 25/10/1999 - 29/10/1999)
Date published: 01/07/2000
Date submitted: 17/05/2017
Identifiers: 99515536902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

Abstract

Files and links (1)

Metrics

Details

Usage Policy