Characterisation of electron-beam deposited tungsten interconnects

GL Kerr; DC Cox; V Stolojan; SRP Silva; RT Baker; G Mobus; PD Brown

doi:10.1088/1742-6596/126/1/012073

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Characterisation of electron-beam deposited tungsten interconnects

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Characterisation of electron-beam deposited tungsten interconnects

GL Kerr, DC Cox, V Stolojan, SRP Silva, RT Baker, G Mobus and PD Brown

EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007, Vol.126, pp.?-?

Electron Microscopy and Analysis Group Conference (Glasgow Caledonian Univ, Glasgow, SCOTLAND, 03/09/2007 - 07/09/2007)

01/01/2008

DOI: https://doi.org/10.1088/1742-6596/126/1/012073

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Science & Technology

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Nanoscience & Nanotechnology

Materials Science

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Materials Science

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Title: Characterisation of electron-beam deposited tungsten interconnects
Creators: GL Kerr
DC Cox
V Stolojan
SRP Silva
RT Baker
G Mobus
PD Brown
Contributors: IOP PUBLISHING LTD (null)
Publication Details: EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007, Vol.126, pp.?-?
Conference: Electron Microscopy and Analysis Group Conference (Glasgow Caledonian Univ, Glasgow, SCOTLAND, 03/09/2007 - 07/09/2007)
Date published: 01/01/2008
Date submitted: 19/10/2012
Identifiers: 99516737602346
Academic Unit: School of Computer Science and Electronic Engineering
Resource Type: Conference presentation

Characterisation of electron-beam deposited tungsten interconnects

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