Characterisation of defects in thin films of hydrogenated amorphous carbon

M Collins; RC Barklie; JV Anguita; JD Carey; SRP Silva

doi:10.1016/S0925-9635(99)00325-8

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Characterisation of defects in thin films of hydrogenated amorphous carbon

Conference presentation

Peer reviewed

Characterisation of defects in thin films of hydrogenated amorphous carbon

M Collins, RC Barklie, JV Anguita, JD Carey and SRP Silva

DIAMOND AND RELATED MATERIALS, Vol.9(3-6), pp.781-785

10th European Conference on Diamond, Diamond-Like Materials, Nitrides and Silicon Carbide (Diamond 1999) (PRAGUE, CZECH REPUBLIC, 12/09/1999 - 17/09/1999)

01/04/2000

DOI: https://doi.org/10.1016/S0925-9635(99)00325-8

Abstract

Science & Technology

Technology

Materials Science

Multidisciplinary

Materials Science

MATERIALS SCIENCE

MULTIDISCIPLINARY

defects

electron paramagnetic resonance

hydrogenated amorphous carbon

silicon substrate

ELECTRON-SPIN-RESONANCE

A-C-H

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Title: Characterisation of defects in thin films of hydrogenated amorphous carbon
Creators: M Collins
RC Barklie
JV Anguita
JD Carey
SRP Silva
Contributors: ELSEVIER SCIENCE SA (Publisher)
Publication Details: DIAMOND AND RELATED MATERIALS, Vol.9(3-6), pp.781-785
Conference: 10th European Conference on Diamond, Diamond-Like Materials, Nitrides and Silicon Carbide (Diamond 1999) (PRAGUE, CZECH REPUBLIC, 12/09/1999 - 17/09/1999)
Date published: 01/04/2000
Date submitted: 17/05/2017
Identifiers: 99512469902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Characterisation of defects in thin films of hydrogenated amorphous carbon

Abstract

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