A study of the surface chemistry, morphology and wear of silicon based MEMS

J Li; Z Cui; MA Baker

doi:10.1002/sia.1888

Back

A study of the surface chemistry, morphology and wear of silicon based MEMS

Conference presentation

Peer reviewed

A study of the surface chemistry, morphology and wear of silicon based MEMS

J Li, Z Cui and MA Baker

SURFACE AND INTERFACE ANALYSIS, Vol.36(8), pp.1254-1258

10th European Conference on Applications of Surface and Interface Analysis (ECASIA 03) (Berlin, GERMANY, 05/10/2003 - 10/10/2003)

01/08/2004

DOI: https://doi.org/10.1002/sia.1888

Abstract

Science & Technology

Physical Sciences

Chemistry

Physical

Chemistry

CHEMISTRY

PHYSICAL

microelectromechanical systems

XPS

atomic force microscopy

wear

ATOMIC-FORCE MICROSCOPY

NANOTRIBOLOGICAL PROPERTIES

MONOLAYER FILMS

IV

SI

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000223652500148&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

36 Record Views

Details

Title: A study of the surface chemistry, morphology and wear of silicon based MEMS
Creators: J Li
Z Cui
MA Baker
Contributors: JOHN WILEY & SONS LTD (Publisher)
Publication Details: SURFACE AND INTERFACE ANALYSIS, Vol.36(8), pp.1254-1258
Conference: 10th European Conference on Applications of Surface and Interface Analysis (ECASIA 03) (Berlin, GERMANY, 05/10/2003 - 10/10/2003)
Date published: 01/08/2004
Date submitted: 17/05/2017
Identifiers: 99512586602346
Academic Unit: University of Surrey
Resource Type: Conference presentation

A study of the surface chemistry, morphology and wear of silicon based MEMS

Abstract

Files and links (1)

Metrics

Details

Usage Policy